ECE 638Semiconductor Microtransducers

Overview of basic physical processes in semiconductors and their interactions with thermal, radiant, mechanical, or chemical input signals. Review of microtransducer materials and technologies. Principles and operation of integrated thermal sensors (thermistors, thermopiles, active IC elements, pyroelectric devices), radiant sensors (optoelectronic, infrared and radiation sensors), magnetic sensors (Hall devices, magnetoresistors, magnetotransistors), (mu)mechanical sensors (piesoelectric and peizoresistive devices, flow sensors and resonant structures), chemical sensors (ion, gas and humidity sensors, CHEMFETs, biosensors, SAW devices), and micro-actuators ((mu)valves, (mu)pumps, (mu)motors). Overview or pertinent interface and modelling techniques.