NANO 606Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
- Units
- 0.50
- Level
- Graduate
- Subject
- Nanotechnology
- Cross-listed
- SYDE 682
NANO 606 as listed in the Fall 2026 Graduate Calendar. The main page has the current version, when it runs, and seats.
Course builds critical understanding in microfabrication, MEMS actuation and sensing mechanisms. Microelectromechanical systems and devices, including microactuators, microsensors, micro-domain forces, microfabrication and their actuation principles. Application domains of MEMS in RF, optics and biosensing. Specific topics include MEMS actuation mechanisms such as electrostatic, electromagnetic, thermal and piezoelectric, and sensing mechanisms such as piezoresistive, capacitive, optical and bio-transducer. Lithography, thinfilm deposition methods and etching techniques will be taught. Course covers practical examples, device architecture, fabrication design rules and fabrication procedures.
Prerequisites
None listed.
Antirequisites
- Complete all of the following
- Not completed nor concurrently enrolled in:
- NANO702
- Not completed nor concurrently enrolled in any of the following:
- SYDE682 - Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication (0.50)
- Not completed nor concurrently enrolled in:
Leads to
No course lists it as a requisite.
Check it elsewhere for Fall 2026
- Graduate Calendar, Fall 2026The official entry
- Requirements for Fall 2026Waterloo’s requisite checker
- Schedule of Classes, Fall 2026Instructors, rooms, live seats
- Quest Class SearchWhere you enrol
- Course outlinesSyllabi from past terms (UW login)
- UW FlowStudent ratings and reviews
- WClassesPast sections back to 2004, and who taught them