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MTE 545Introduction to MEMS Fabrication

Units
0.50
Faculty
Engineering
Subject
Mechatronics Engineering

When it runs

  1. F24
  2. W25
  3. S25
  4. F25
  5. W26
  6. S26
  7. F26
  8. W27
  9. S27

Ran in 4 of the last 7 terms. Winter 2027: not on the schedule. Spring 2027: schedule not out yet.

Introduction to MEMS. Fabrication processes for MEMS devices. Basic MEMS governing equations in different energy domains (mechanical, electrical, and thermal). Methods for layout, design, and modelling of MEMS devices. Simulation techniques. Techniques for testing and characterization of MEMS devices.

Prerequisites

Antirequisites

None listed.

Leads to

No course lists it as a requisite.

Fall 2026 sections

Enrolment from UW Open Data, which can trail Quest by up to two days. Instructors and rooms: Schedule of Classes.
SectionClassEnrolledMeets
LEC 001533226 / 30MWF 12:30–13:20

Reviewed on UW Flow

67% liked it40% easy95% useful

From 6 ratings and 5 comments on UW Flow. The most helpful comments, quoted as written, without names. Read them all on UW Flow.

  • Maybe in January 2015 it was an easy course with no final but that was not the case this year. The prof is super nice and by the end of the course you will have become semi-proficient at introductory MEMS (or you will have failed). This term there were 4 labs, 3 homework assignments (almost 4), 2 "tutorials" that give experience using the MEMS equivalent of CAD software, and a handful of in-class exercises which made up the bulk of the grades. Each of those is not worth a lot but takes a fair amount of time to complete. Those, (plus some i-clicker questions, etc.), made up about 45% of the grades while the midterm and final were 25% and 30% respectively. It is worth it get as much of the…

    Dec 2017 · liked it · 1 found this helpfulOn UW FlowRemove this

  • Not an easy course by any means. Lots of work load, including 4 labs and several homework assignments which include CAD projects. Material itself is also quite challenging and requires previous knowledge of solid mechanics.

    Dec 2017 · didn’t like it · 1 found this helpfulOn UW FlowRemove this

  • To be candid, I took this course because I thought it would be easy. It is not, there are few difficult concepts in the course, but you need to be INTIMATELY familiar with the materials and processes covered, you may have an option to do labs/assignments before or after the midterm, DO THEM BEFORE, they will show up on the midterm. This is not a bird course, and it is a constant stream of work.

    Oct 2017 · liked it · 1 found this helpfulOn UW FlowRemove this

  • This course was great. Incredibly interesting (how do you design and manufacture small mechatronics devices?) while also having a light workload and NO final! Labs were so cool.

    Nov 2014 · liked it · 1 found this helpfulOn UW FlowRemove this

  • Took this one online during COVID. Kind of like a survey course for engineering. You will learn a lot about MEMS, and if you didn't know anything about MEMS or microfabrication you will find it pretty interesting, but for the most part wasn't too engaging technically. You had to be familiar with the content but didn't need a deep level of understanding to do very well on the midterms. Despite the relatively easy assessments and forgiving marking scheme, (several low-weight tests and labs, along with participation marks) this course still required a decent time commitment with deliverables nearly every week.

    Dec 2020 · liked itOn UW FlowRemove this

Discussed on r/uwaterloo

3 posts and comments in 2 threads mention MTE 545, October 2017 to December 2024. Quoted word for word, newest first; each reply sits under the post and the comment that started its branch. Search r/uwaterloo for newer posts.

Spring 2021

Fall 2017

Any way to disable UWCourseLinker from posting? 16 points, 26 comments

“posting a reply to my comment I find the bot annoying.”

u/Jackhofmann: “PSYCH 483 PSYCH 484 PSYCH 485 PSYCH 486 PSYCH 490R PSYCH 499A PSYCH 499B PSYCH 499C PSYCH 621 PSYCH 630 PSYCH 677A PSYCH 704A PSYCH 704B PSYCH 707 PSYCH 710 PSYCH 714 PSYCH 717 PSYCH 720A PSYCH 721A …”

u/Jackhofmann: “… MTE 220 MTE 241 MTE 262 MTE 300B MTE 322 MTE 360 MTE 380 MTE 400A MTE 420 MTE 481 MTE 544 MTE 545 MTHEL 131 MTHEL 300 MUSIC 100 MUSIC 110 MUSIC 111 MUSIC 116 MUSIC 117 MUSIC 121W MUSIC 140 MUSIC 181AW MUSIC 216 MUSIC 217 MUSIC 222 MUSIC 226 MUSIC 227 MUSIC 232 MUSIC 253 MUSIC …”

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Check it elsewhere for Fall 2026

Calendar versions

Undergraduate Calendar